Authors

Eneman, Geert; Verheyen, Peter; Rooyackers, Rita; Delhougne, Romain; Loo, Roger; Caymax, Matty; Meunier-Beillard, Philippe; De Meyer, Kristin; Vandervorst, Wilfried

Journal

Materials Science in Semiconductor Processing

Title

Fabrication of strained Si NMOS transistors on thin buffer layers with selective and non-selective epitaxial growth techniques

Publication type

Journal article