Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Conference contributions
High resolution two-dimensional carrier profiling on sub-100nm silicon nano-devices using scanning spreading resistance microscopy
Publication:
High resolution two-dimensional carrier profiling on sub-100nm silicon nano-devices using scanning spreading resistance microscopy
Date
2004
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Eyben, Pierre
;
Fukutome, H.
;
Alvarez, David
;
Vandervorst, Wilfried
Journal
Abstract
Description
Metrics
Views
1882
since deposited on 2021-10-15
419
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
1882
since deposited on 2021-10-15
419
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations