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High resolution two-dimensional carrier profiling on sub-100nm silicon nano-devices using scanning spreading resistance microscopy

dc.contributor.authorEyben, Pierre
dc.contributor.authorFukutome, H.
dc.contributor.authorAlvarez, David
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-15T13:23:17Z
dc.date.available2021-10-15T13:23:17Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8896
dc.sourceIIOimport
dc.titleHigh resolution two-dimensional carrier profiling on sub-100nm silicon nano-devices using scanning spreading resistance microscopy
dc.typeProceedings paper
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.beginpage101
dc.source.endpage104
dc.source.conferenceProceedings of the 34th European Solid-State Device Research Conference - ESSDERC
dc.source.conferencedate21/09/2004
dc.source.conferencelocationLeuven Velgium
imec.availabilityPublished - imec


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