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Influence of top electrode deposition conditions on the reliability of integrated SBT ferroelectric capacitors

dc.contributor.authorGoux, Ludovic
dc.contributor.authorXu, Zhen
dc.contributor.authorParaschiv, Vasile
dc.contributor.authorSchwitters, M.
dc.contributor.authorLisoni, Judit
dc.contributor.authorMaes, David
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorZambrano, R.
dc.contributor.authorWouters, Dirk
dc.date.accessioned2021-10-15T13:38:21Z
dc.date.available2021-10-15T13:38:21Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8976
dc.sourceIIOimport
dc.titleInfluence of top electrode deposition conditions on the reliability of integrated SBT ferroelectric capacitors
dc.typeOral presentation
dc.contributor.imecauthorGoux, Ludovic
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecGoux, Ludovic::0000-0002-1276-2278
dc.contributor.orcidimecHaspeslagh, Luc::0000-0003-3561-3387
dc.contributor.orcidimecGroeseneken, Guido::0000-0003-3763-2098
dc.source.peerreviewno
dc.source.conferenceJournées Couches Ferroelectriques - JCF
dc.source.conferencedate18/11/2004
dc.source.conferencelocationBesançon France
imec.availabilityPublished - imec


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