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The nucleation of ALD HfO2 films, and evolution of their morphology, studied by grazing incidence small angle x-ray scattering by synchroton radiation

dc.contributor.authorGreen, Martin L.
dc.contributor.authorLi, Xuefa
dc.contributor.authorWang, Jin
dc.contributor.authorAllen, Andrew J.
dc.contributor.authorDelabie, Annelies
dc.contributor.authorPuurunen, Riikka
dc.contributor.authorBrijs, Bert
dc.contributor.authorVanhaeren, Danielle
dc.date.accessioned2021-10-15T13:39:18Z
dc.date.available2021-10-15T13:39:18Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8981
dc.sourceIIOimport
dc.titleThe nucleation of ALD HfO2 films, and evolution of their morphology, studied by grazing incidence small angle x-ray scattering by synchroton radiation
dc.typeProceedings paper
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorVanhaeren, Danielle
dc.contributor.orcidimecVanhaeren, Danielle::0000-0001-8624-9533
dc.source.peerreviewno
dc.source.conferenceAtomic Layer Deposition Conference
dc.source.conferencedate16/08/2004
dc.source.conferencelocationHelsinki Finland
imec.availabilityPublished - imec
imec.internalnotescd-rom proceedings


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