Authors

Stevens, Rudi; Witvrouw, Ann; Roussel, Philippe; Maex, Karen; Meynen, Herman; Cuthbertson, Alan

Journal

Appl. Surf. Sci.

Volume

91

Title

Influence of the antireflection coating on the electromigration resistance of 0.5 µm technology metal-2 line structures

Publication type

Journal article

Embargo date

9999-12-31