The role of TXRF in the introduction of high-k materials into IC processing

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Authors
Hellin, David; Onsia, Bart; Delabie, Annelies; De Gendt, Stefan; Vinckier, Chris
Conference
Physics and Technology of High-k Gate Dielectrics II
Title
The role of TXRF in the introduction of high-k materials into IC processing
Publication type
Proceedings paper
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