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Validation of vapor phase decomposition - droplet collection - total reflection X-ray fluorescence spectrometry for metallic contamination analysis of silicon wafers
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Authors
Hellin, David
;
Rip, Jens
;
Arnauts, Sophia
;
De Gendt, Stefan
;
Mertens, Paul
;
Vinckier, Chris
Issue
8
Journal
Spectrochim. Acta B
Volume
59
Title
Validation of vapor phase decomposition - droplet collection - total reflection X-ray fluorescence spectrometry for metallic contamination analysis of silicon wafers
Publication type
Journal article
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