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Scaling of Hf-based high-k dielectrics

dc.contributor.authorHeyns, Marc
dc.contributor.authorBeckx, Stephan
dc.contributor.authorCaymax, Matty
dc.contributor.authorChen, J.
dc.contributor.authorClaes, Martine
dc.contributor.authorCoenegrachts, Bart
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorDegraeve, R.
dc.contributor.authorDelabie, Annelies
dc.contributor.authorDeweerd, Wim
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorHayashi, Shigenori
dc.contributor.authorHenson, Kirklen
dc.contributor.authorHooker, Jacob
dc.contributor.authorHoussa, Michel
dc.contributor.authorKauerauf, Thomas
dc.contributor.authorKerber, A.
dc.contributor.authorKwak, Dong Hwa
dc.contributor.authorLander, Rob
dc.contributor.authorLujan, Guilherme
dc.contributor.authorNiwa, Masaaki
dc.contributor.authorPantisano, Luigi
dc.contributor.authorPuurunen, Riikka
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorRohr, Erika
dc.contributor.authorSchram, Tom
dc.contributor.authorShimamoto, Y.
dc.contributor.authorTsai, Wilman
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorVertommen, Johan
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorKubicek, Stefan
dc.date.accessioned2021-10-15T13:49:07Z
dc.date.available2021-10-15T13:49:07Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9028
dc.sourceIIOimport
dc.titleScaling of Hf-based high-k dielectrics
dc.typeMeeting abstract
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorBeckx, Stephan
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorClaes, Martine
dc.contributor.imecauthorCoenegrachts, Bart
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorHoussa, Michel
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorKubicek, Stefan
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecHoussa, Michel::0000-0003-1844-3515
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.source.peerreviewno
dc.source.beginpage5
dc.source.endpage6
dc.source.conferenceInternational Workshop on Dielectric Thin Films for Future ULSI Devices
dc.source.conferencedate26/05/2004
dc.source.conferencelocationTokyo Japan
imec.availabilityPublished - imec


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