Publication:
Sub-1nm EOT scaling for high-k metal-gate stacks
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1834 since deposited on 2021-10-15
1last month
Acq. date: 2026-06-05
Citations
Statistics
Views
1834 since deposited on 2021-10-15
1last month
Acq. date: 2026-06-05
Citations