Negative bias temperature instabilities in HfSiON/TaN-based pMOSFETs

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Authors
Houssa, Michel; Aoulaiche, Marc; Van Elshocht, Sven; De Gendt, Stefan; Groeseneken, Guido; Heyns, Marc
Conference
Technical Digest International Electronic Devices Meeting - IEDM
Title
Negative bias temperature instabilities in HfSiON/TaN-based pMOSFETs
Publication type
Proceedings paper
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