Authors

Iacopi, Francesca; Travaly, Youssef; Stucchi, Michele; Struyf, Herbert; Peeters, Stefan; Jonckheere, Rik; Leunissen, Peter; Tokei, Zsolt; Sutcliffe, Victor; Richard, Olivier; Van Hove, Marleen; Maex, Karen

Conference

Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics

Title

Processing damage and electrical performance of porous dielectrics in narrow spaced interconnects

Publication type

Proceedings paper

Embargo date

9999-12-31