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Mechanical and electrical characterization of BCB as a bond&seal material for cavities housing (RF-)MEMS devices

dc.contributor.authorJourdain, Anne
dc.contributor.authorDe Moor, Piet
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-15T14:05:12Z
dc.date.available2021-10-15T14:05:12Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9103
dc.sourceIIOimport
dc.titleMechanical and electrical characterization of BCB as a bond&seal material for cavities housing (RF-)MEMS devices
dc.typeProceedings paper
dc.contributor.imecauthorJourdain, Anne
dc.contributor.imecauthorDe Moor, Piet
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage167
dc.source.endpage170
dc.source.conferenceProceedings 15th MicroMechanics Workshop - MME
dc.source.conferencedate5/09/2004
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - open access


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