Triple junctions for reduced impact of offset spacer variation on CMOS device parameters

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Authors
Jurczak, Gosia; Rooyackers, Rita; De Keersgieter, An; Kunnen, Eddy; Henson, Kirklen; Richard, Olivier; Dachs, Charles
Conference
Proceedings of the 34th European Solid-State Device Research Conference - ESSDERC
Title
Triple junctions for reduced impact of offset spacer variation on CMOS device parameters
Publication type
Proceedings paper
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