Show simple item record

Triple junctions for reduced impact of offset spacer variation on CMOS device parameters

dc.contributor.authorJurczak, Gosia
dc.contributor.authorRooyackers, Rita
dc.contributor.authorDe Keersgieter, An
dc.contributor.authorKunnen, Eddy
dc.contributor.authorHenson, Kirklen
dc.contributor.authorRichard, Olivier
dc.contributor.authorDachs, Charles
dc.date.accessioned2021-10-15T14:05:37Z
dc.date.available2021-10-15T14:05:37Z
dc.date.issued2004-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9105
dc.sourceIIOimport
dc.titleTriple junctions for reduced impact of offset spacer variation on CMOS device parameters
dc.typeProceedings paper
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorDe Keersgieter, An
dc.contributor.imecauthorRichard, Olivier
dc.contributor.orcidimecDe Keersgieter, An::0000-0002-5527-8582
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.source.peerreviewno
dc.source.beginpage145
dc.source.endpage148
dc.source.conferenceProceedings of the 34th European Solid-State Device Research Conference - ESSDERC
dc.source.conferencedate21/09/2004
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record