Single Wavelength and Spectroscopic Ellipsometry Characterization of Ultra-Thin Gate Oxides on Silicon and Comparison with Electrical Results
dc.contributor.author | Tonova, Diana | |
dc.contributor.author | Depas, Michel | |
dc.contributor.author | Libezny, Milan | |
dc.contributor.author | Heyns, Marc | |
dc.contributor.author | Vanhellemont, Jan | |
dc.date.accessioned | 2021-09-29T13:17:49Z | |
dc.date.available | 2021-09-29T13:17:49Z | |
dc.date.issued | 1995 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/912 | |
dc.source | IIOimport | |
dc.title | Single Wavelength and Spectroscopic Ellipsometry Characterization of Ultra-Thin Gate Oxides on Silicon and Comparison with Electrical Results | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Heyns, Marc | |
dc.source.peerreview | no | |
dc.source.conference | WISE: Workshop International on Spectroscopic Ellipsometry; February 9-11, 1995; Erlangen, Germany. | |
dc.source.conferencelocation | ||
imec.availability | Published - imec |
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