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Investigation of Ni fully silicided gates for sub-45 nm CMOS technologies
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Investigation of Ni fully silicided gates for sub-45 nm CMOS technologies
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Date
2004
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kmieciak, Malgorzata
;
Kittl, Jorge
;
Chamirian, Oxana
;
Veloso, Anabela
;
Lauwers, Anne
;
Schram, Tom
;
Maex, Karen
;
Vantomme, Andre
Journal
Microelectronic Engineering
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Views
1927
since deposited on 2021-10-15
1
last month
1
last week
Acq. date: 2026-08-03
Citations