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Determining the transfer function of a mask fabrication process
Publication:
Determining the transfer function of a mask fabrication process
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Date
2004
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Leunissen, Peter
;
Philipsen, Vicky
;
Jonckheere, Rik
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1908
since deposited on 2021-10-15
Acq. date: 2025-12-18
Citations
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Views
1908
since deposited on 2021-10-15
Acq. date: 2025-12-18
Citations