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Determining the transfer function of a mask fabrication process

dc.contributor.authorLeunissen, Peter
dc.contributor.authorPhilipsen, Vicky
dc.contributor.authorJonckheere, Rik
dc.date.accessioned2021-10-15T14:26:34Z
dc.date.available2021-10-15T14:26:34Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9197
dc.sourceIIOimport
dc.titleDetermining the transfer function of a mask fabrication process
dc.typeProceedings paper
dc.contributor.imecauthorPhilipsen, Vicky
dc.contributor.imecauthorJonckheere, Rik
dc.contributor.orcidimecPhilipsen, Vicky::0000-0002-2959-432X
dc.contributor.orcidimecJonckheere, Rik::0000-0003-2211-9443
dc.source.peerreviewno
dc.source.beginpage36
dc.source.endpage45
dc.source.conference20th European Conference on Mask Technology for Integrated Circuits and Microcomponents
dc.source.conferencedate12/01/2004
dc.source.conferencelocationDresden Germany
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol. 5504


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