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Stress evolution in integrated SrBi2Ta2O9 ferroelectric layers
Publication:
Stress evolution in integrated SrBi2Ta2O9 ferroelectric layers
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Date
2004
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lisoni, Judit
;
Wafer, K.
;
Johnson, J.A.
;
Goux, Ludovic
;
Schwitters, M.
;
Paraschiv, Vasile
;
Maes, David
;
Haspeslagh, Luc
;
Caputa, Concetta
;
Zambrano, R.
;
Wouters, Dirk
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1906
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Acq. date: 2025-12-10
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Views
1906
since deposited on 2021-10-15
3
last month
1
last week
Acq. date: 2025-12-10
Citations