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Stress evolution in integrated SrBi2Ta2O9 ferroelectric layers

dc.contributor.authorLisoni, Judit
dc.contributor.authorWafer, K.
dc.contributor.authorJohnson, J.A.
dc.contributor.authorGoux, Ludovic
dc.contributor.authorSchwitters, M.
dc.contributor.authorParaschiv, Vasile
dc.contributor.authorMaes, David
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorCaputa, Concetta
dc.contributor.authorZambrano, R.
dc.contributor.authorWouters, Dirk
dc.date.accessioned2021-10-15T14:30:47Z
dc.date.available2021-10-15T14:30:47Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9213
dc.sourceIIOimport
dc.titleStress evolution in integrated SrBi2Ta2O9 ferroelectric layers
dc.typeProceedings paper
dc.contributor.imecauthorGoux, Ludovic
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.orcidimecGoux, Ludovic::0000-0002-1276-2278
dc.source.peerreviewno
dc.source.beginpage3
dc.source.endpage8
dc.source.conferenceFerroelectric Thin Films XII
dc.source.conferencedate1/12/2003
dc.source.conferencelocationBoston, MA USA
imec.availabilityPublished - imec
imec.internalnotesMaterials Research Symposium Proceedings; Vol. 784


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