Publication:

Maximization of active As doping (selective) epitaxial Si and SiGe layers

Date

2004-10

Proceedings Paper

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Files

8914.pdf 621.84 KB

Author(s)

;

Bajolet, Philippe

;

Bauer, Matthias

;

Maes, Jan-Willem

;

;

Statistics

1961 since deposited on 2021-10-15

Acq. date: 2026-06-20