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Maximization of active As doping (selective) epitaxial Si and SiGe layers
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1945 since deposited on 2021-10-15
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Acq. date: 2025-10-25
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Views
1945 since deposited on 2021-10-15
426item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations