Publication:

(Selective) epitaxial growth of strained Si to fabricate low cost and high performance CMOS devices

Date

2004

Proceedings Paper

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Files

8133.pdf 817.86 KB

Author(s)

;

Delhougne, Romain

;

Meunier-Beillard, Philippe

;

;

Verheyen, Peter

;

;

De Wolf, Ingrid

;

;

Benedetti, Alessandro

;

De Meyer, Kristin

;

Vandervorst, Wilfried

;

Metrics

1877 since deposited on 2021-10-15

Acq. date: 2026-01-09