Authors

Loo, Roger; Delhougne, Romain; Meunier-Beillard, Philippe; Caymax, Matty; Verheyen, Peter; Eneman, Geert; De Wolf, Ingrid; Janssens, Tom; Benedetti, Alessandro; De Meyer, Kristin; Vandervorst, Wilfried; Heyns, Marc

Conference

High-Mobility Group-IV Materials and Devices

Title

(Selective) epitaxial growth of strained Si to fabricate low cost and high performance CMOS devices

Publication type

Proceedings paper

Embargo date

9999-12-31