Authors

Lujan, Guilherme; Ragnarsson, Lars-Ake; Kubicek, Stefan; De Gendt, Stefan; Heyns, Marc; De Meyer, Kristin

Conference

13th Workshop on Dielectrics in Microelectronics - WODIM

Title

Modeling mobility degradation due to remote Coulomb scattering from dielectric charges and its impact on MOS device performance

Publication type

Proceedings paper