Publication:

He implantation induced relaxation of SiGe/Si: nucleation of dislocations and coarsening of He bubbles

Date

2004
Proceedings Paper
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Author(s)

Luysberg, M.
;
Hueging, N.
;
Urban, K.
;
Buca, D.
;
Holländer, B.
;
Mantl, S.
;
Morschbacher, M.
;
Fichner, P.F.P.
;
Loo, Roger  
;
Caymax, Matty  

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1931 since deposited on 2021-10-15
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