Authors

Luysberg, M.; Hueging, N.; Urban, K.; Buca, D.; Holländer, B.; Mantl, S.; Morschbacher, M.; Fichner, P.F.P.; Loo, Roger; Caymax, Matty

Conference

Program and Abstracts Book 2nd International SiGe Technology and Device Meeting - ISTDM

Title

He implantation induced relaxation of SiGe/Si: nucleation of dislocations and coarsening of He bubbles

Publication type

Proceedings paper