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He implantation induced relaxation of SiGe/Si: nucleation of dislocations and coarsening of He bubbles
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1925 since deposited on 2021-10-15
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Acq. date: 2025-10-25
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Views
1925 since deposited on 2021-10-15
404item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations