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The role of internal dislocation sources for the strain ralaxation of pseudomorphic SiGe/Si structures

dc.contributor.authorLuysberg, Martina
dc.contributor.authorHueging, Norbert
dc.contributor.authorLenk, Steffi
dc.contributor.authorBuca, Dan
dc.contributor.authorHollaender, Bernd
dc.contributor.authorMantl, Siegfried
dc.contributor.authorMarcio, J
dc.contributor.authorFichtner, Paulo
dc.contributor.authorLoo, Roger
dc.contributor.authorCaymax, Matty
dc.date.accessioned2021-10-15T14:36:48Z
dc.date.available2021-10-15T14:36:48Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9237
dc.sourceIIOimport
dc.titleThe role of internal dislocation sources for the strain ralaxation of pseudomorphic SiGe/Si structures
dc.typeOral presentation
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.source.peerreviewno
dc.source.conferenceMRS Spring Meeting Symposium B: High-Mobility Group-IV Materials and Devices
dc.source.conferencedate12/04/2004
dc.source.conferencelocationSan Fransisco, CA USA
imec.availabilityPublished - imec


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