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Integration of MOCVD SBT stacked ferroelectric capacitors in A 0.35um CMOS technology

dc.contributor.authorMaes, David
dc.contributor.authorEveraert, Jean-Luc
dc.contributor.authorGoux, Ludovic
dc.contributor.authorLisoni, Judit
dc.contributor.authorParaschiv, Vasile
dc.contributor.authorSchuster, Thomas
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorWouters, Dirk
dc.contributor.authorArtoni, C.
dc.contributor.authorCaputa, Concetta
dc.contributor.authorCasella, P.
dc.contributor.authorCorallo, G.
dc.contributor.authorRusso, G.
dc.contributor.authorZambrano, R.
dc.contributor.authorMonchoix, H.
dc.contributor.authorVan Autryve, Luc
dc.date.accessioned2021-10-15T14:39:12Z
dc.date.available2021-10-15T14:39:12Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9247
dc.sourceIIOimport
dc.titleIntegration of MOCVD SBT stacked ferroelectric capacitors in A 0.35um CMOS technology
dc.typeOral presentation
dc.contributor.imecauthorEveraert, Jean-Luc
dc.contributor.imecauthorGoux, Ludovic
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorVan Autryve, Luc
dc.contributor.orcidimecGoux, Ludovic::0000-0002-1276-2278
dc.source.peerreviewno
dc.source.conferenceThe 16th International Symposium on Integrated Ferroelectrics
dc.source.conferencedate5/04/2004
dc.source.conferencelocationGyeongju Korea
imec.availabilityPublished - imec


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