Authors

Maex, Karen; Brongersma, Sywert; Iacopi, Francesca; Travaly, Youssef; Tokei, Zsolt; Bruynseraede, Christophe; Beyer, Gerald

Conference

Proceedings 3rd Hiroshima International Workshop on Nanoelectronics for Tera-Bit Information Processing

Title

Characterization and optimization of Cu-low k for 45nm and beyond

Publication type

Proceedings paper

Embargo date

9999-12-31