Strained silicon on relaxed SiGe made by strain transfer

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Authors
Mantl, Siegfried; Buca, Dan M.; Holländer, Bernd; Trinkaus, Helmut; Luysberg, Martina; Houben, L.; Carius, Reinhard; Loo, Roger; Caymax, Matty; Schäfer, Herbert
Conference
Program and Abstracts Book 2nd International SiGe Technology and Device Meeting - ISTDM
Title
Strained silicon on relaxed SiGe made by strain transfer
Publication type
Meeting abstract
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