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Microstructural characterization of side walls in SBT 3D capacitors

dc.contributor.authorMenou, N.
dc.contributor.authorGoux, Ludovic
dc.contributor.authorLisoni, Judit
dc.contributor.authorSchwitters, M.
dc.contributor.authorTurquat, Ch.
dc.contributor.authorMadigou, V.
dc.contributor.authorHodeau, J-L.
dc.contributor.authorMuller, Ch.
dc.contributor.authorWouters, Dirk
dc.date.accessioned2021-10-15T14:48:42Z
dc.date.available2021-10-15T14:48:42Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9285
dc.sourceIIOimport
dc.titleMicrostructural characterization of side walls in SBT 3D capacitors
dc.typeOral presentation
dc.contributor.imecauthorGoux, Ludovic
dc.contributor.orcidimecGoux, Ludovic::0000-0002-1276-2278
dc.source.peerreviewno
dc.source.conference16th International Symposium on Integrated Ferroelectrics
dc.source.conferencedate5/04/2004
dc.source.conferencelocation
imec.availabilityPublished - imec
imec.internalnotesBest poster award


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