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Creep as a reliability problem in MEMS

dc.contributor.authorModlinski, Robert
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorRatchev, Petar
dc.contributor.authorPuers, Bob
dc.contributor.authorToonder, J.M.J
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-15T14:55:31Z
dc.date.available2021-10-15T14:55:31Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9309
dc.sourceIIOimport
dc.titleCreep as a reliability problem in MEMS
dc.typeProceedings paper
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage84
dc.source.endpage87
dc.source.conferenceProceedings 15th MicroMechanics Europe Workshop
dc.source.conferencedate5/09/2004
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - open access


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