Creep as a reliability problem in MEMS

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Authors
Modlinski, Robert; Witvrouw, Ann; Ratchev, Petar; Puers, Bob; Toonder, J.M.J; De Wolf, Ingrid
Conference
Proceedings 15th MicroMechanics Europe Workshop
Title
Creep as a reliability problem in MEMS
Publication type
Proceedings paper
Embargo date
9999-12-31
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