Publication:

Creep as a reliability problem in MEMS

Date

2004
Proceedings Paper
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cris.virtual.orcid0000-0003-3822-5953
cris.virtual.orcid#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtualsource.department99f46578-0b77-4a3f-b8e5-a6879cd2ea9a
cris.virtualsource.departmenta425612d-2cfa-4e79-ac6a-6b49f02576a6
cris.virtualsource.orcid99f46578-0b77-4a3f-b8e5-a6879cd2ea9a
cris.virtualsource.orcida425612d-2cfa-4e79-ac6a-6b49f02576a6
dc.contributor.authorModlinski, Robert
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorRatchev, Petar
dc.contributor.authorPuers, Bob
dc.contributor.authorToonder, J.M.J
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned2021-10-15T14:55:31Z
dc.date.available2021-10-15T14:55:31Z
dc.date.embargo9999-12-31
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9309
dc.source.beginpage84
dc.source.conferenceProceedings 15th MicroMechanics Europe Workshop
dc.source.conferencedate5/09/2004
dc.source.conferencelocationLeuven Belgium
dc.source.endpage87
dc.title

Creep as a reliability problem in MEMS

dc.typeProceedings paper
dspace.entity.typePublication
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