Publication:
Determination of stress profile and optimization of stress gradient in PECVD poly-SiGe films
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1862 since deposited on 2021-10-15
1last month
Acq. date: 2026-04-06
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Statistics
Views
1862 since deposited on 2021-10-15
1last month
Acq. date: 2026-04-06
Citations