Authors

Morschbacher, M.J.; da Silva, D.L.; Fichtner, P.F.P.; Oliviero, E.; Behar, M.; Zawislak, F.C.; Hollander, B.; Luysberg, M.; Mantl, S.; Loo, Roger; Caymax, Matty

Journal

Nuclear Instruments & Methods in Physics Research B

Volume

219-220

Title

Microstructure evolution effects of helium redistribution in as-implanted silicon and Si0.8Ge0.2/Si heterostructures

Publication type

Journal article