A study of the influence of typical wet chemical treatments on the germanium wafer surface

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Authors
Onsia, Bart; Conard, Thierry; De Gendt, Stefan; Heyns, Marc; Hoflijk, Ilse; Mertens, Paul; Meuris, Peter; Raskin, G.; Sioncke, Sonja; Teerlinck, I; Theuwis, A.; Van Steenbergen, Jan; Vinckier, Chris
Conference
7th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS
Title
A study of the influence of typical wet chemical treatments on the germanium wafer surface
Publication type
Oral presentation
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