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A reliable and compact polymer-based package for capacitive RF-MEMS switches

dc.contributor.authorOya, Y.
dc.contributor.authorOkubora, A.
dc.contributor.authorvan Spengen, Merlijn
dc.contributor.authorSoussan, Philippe
dc.contributor.authorStoukatch, Serguei
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorRatchev, Petar
dc.contributor.authorTilmans, Harrie
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorBeyne, Eric
dc.contributor.authorDe Moor, Piet
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorBaert, Kris
dc.date.accessioned2021-10-15T15:13:53Z
dc.date.available2021-10-15T15:13:53Z
dc.date.issued2004-12
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9377
dc.sourceIIOimport
dc.titleA reliable and compact polymer-based package for capacitive RF-MEMS switches
dc.typeProceedings paper
dc.contributor.imecauthorSoussan, Philippe
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorBeyne, Eric
dc.contributor.imecauthorDe Moor, Piet
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecSoussan, Philippe::0000-0002-1347-6978
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewyes
dc.source.beginpage31
dc.source.endpage34
dc.source.conferenceTechnical Digest International Electron Device Meeting - IEDM
dc.source.conferencedate13/12/2004
dc.source.conferencelocationWashington, D.C. USA
imec.availabilityPublished - imec


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