Authors

Pawlak, Bartek; Vandervorst, Wilfried; Lindsay, Richard; De Wolf, Ingrid; Roozeboom, F.; Delhougne, Romain; Benedetti, Alessandro; Loo, Roger; Caymax, Matty; Maex, Karen; Cowern, N.E.B.

Conference

High-Mobility Group-IV Materials and Devices

Title

The role of preamorphization and activation for ultra shallow junction formation on strained Si layers grown on SiGe buffer

Publication type

Proceedings paper

Embargo date

9999-12-31