Publication:
The role of preamorphization and activation for ultra shallow junction formation on strained Si layers grown on SiGe buffer
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1877 since deposited on 2021-10-15
1last month
Acq. date: 2026-05-02
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Statistics
Views
1877 since deposited on 2021-10-15
1last month
Acq. date: 2026-05-02
Citations