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On the nature of weak spots in high-k layers submitted to anneals

dc.contributor.authorPetry, Jasmine
dc.contributor.authorVandervorst, Alain
dc.contributor.authorRichard, Olivier
dc.contributor.authorConard, Thierry
dc.contributor.authorDewolf, P.
dc.contributor.authorKaushik, Vidya
dc.contributor.authorDelabie, Annelies
dc.contributor.authorVan Elshocht, Sven
dc.date.accessioned2021-10-15T15:25:02Z
dc.date.available2021-10-15T15:25:02Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9419
dc.sourceIIOimport
dc.titleOn the nature of weak spots in high-k layers submitted to anneals
dc.typeProceedings paper
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.source.peerreviewno
dc.source.beginpage203
dc.source.endpage208
dc.source.conferenceIntegration of Advanced Micro- and Nanoelectronic Devices. Critical Issues and Solutions
dc.source.conferencedate12/04/2004
dc.source.conferencelocationSan Fransisco, CA USA
imec.availabilityPublished - imec
imec.internalnotesMaterials Research Society Symposium Proceedings; Vol. 811


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