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Effect of N2 anneal on thin HfO2 layers studied by C-AFM
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Effect of N2 anneal on thin HfO2 layers studied by C-AFM
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Date
2004
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Petry, Jasmine
;
Vandervorst, Wilfried
;
Blasco, X.
Journal
Microelectronic Engineering
Abstract
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1961
since deposited on 2021-10-15
2
last month
Acq. date: 2025-12-09
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Metrics
Views
1961
since deposited on 2021-10-15
2
last month
Acq. date: 2025-12-09
Citations