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In-line litho cluster monitoring and control using integrated scatterometry

dc.contributor.authorPollentier, Ivan
dc.contributor.authorCheng, Shaunee
dc.contributor.authorBaudemprez, Bart
dc.contributor.authorLaidler, David
dc.contributor.authorvan Dommelen, Y.
dc.contributor.authorCarpaij, R.
dc.contributor.authorYu, J.
dc.contributor.authorUchida, J.
dc.contributor.authorViswanathan, A.
dc.contributor.authorChin, D.T.
dc.contributor.authorBarry, K.
dc.contributor.authorJakatdar, N.
dc.date.accessioned2021-10-15T15:33:04Z
dc.date.available2021-10-15T15:33:04Z
dc.date.issued2004-02
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9450
dc.sourceIIOimport
dc.titleIn-line litho cluster monitoring and control using integrated scatterometry
dc.typeProceedings paper
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.imecauthorBaudemprez, Bart
dc.contributor.imecauthorLaidler, David
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.contributor.orcidimecLaidler, David::0000-0003-4055-3366
dc.source.peerreviewno
dc.source.beginpage105
dc.source.endpage115
dc.source.conferenceData Analysis and Modeling for Process Control
dc.source.conferencedate22/02/2004
dc.source.conferencelocationSanta Clara, CA USA
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; vol. 5378


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