Publication:
Impact of STI width and spacing on the stress generation in deep submicron CMOS
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Views
1781 since deposited on 2021-10-15
Acq. date: 2026-05-19
Citations
Statistics
Views
1781 since deposited on 2021-10-15
Acq. date: 2026-05-19
Citations