Impact of STI width and spacing on the stress generation in deep submicron CMOS

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Authors
Poyai, A.; Rittaporn, I.; Simoen, Eddy; Claeys, Cor; Rooyackers, Rita
Conference
High Purity Silicon VIII
Title
Impact of STI width and spacing on the stress generation in deep submicron CMOS
Publication type
Proceedings paper
Embargo date
9999-12-31
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