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Random deposition as a growth mode in atomic layer deposition
Publication:
Random deposition as a growth mode in atomic layer deposition
Date
2004
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Puurunen, Riikka
Journal
Chemical Vapor Deposition
Abstract
Description
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1870
since deposited on 2021-10-15
Acq. date: 2025-10-24
Citations
Metrics
Views
1870
since deposited on 2021-10-15
Acq. date: 2025-10-24
Citations