Publication:
Analysis of hydroxyl group controlled atomic layer deposition of hafnium dioxide from hafnium tetrachloride and water
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1892 since deposited on 2021-10-15
3last month
1last week
Acq. date: 2026-01-11
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Views
1892 since deposited on 2021-10-15
3last month
1last week
Acq. date: 2026-01-11
Citations