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Correlation between the growth-per-cycle and the surface OH group concentration in the AIMe3/H2O ALD process
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1982 since deposited on 2021-10-15
1last month
Acq. date: 2026-01-08
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Metrics
Views
1982 since deposited on 2021-10-15
1last month
Acq. date: 2026-01-08
Citations