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An XPS study of the effects of semiconductor processing treatments used to make InP optoelectronic devices
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Authors
Van Meirhaeghe, R. L.
;
Goubert, L.
;
Fiermans, L.
;
Laflère, W. H.
;
Cardon, F.
;
De Dobbelaere, Peter
;
Van Daele, P.
Conference
Microscopy of Semiconducting Materials 1995
Title
An XPS study of the effects of semiconductor processing treatments used to make InP optoelectronic devices
Publication type
Proceedings paper
Embargo date
9999-12-31
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