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Diffusion-less junctions and super halo profiles for PMOS transistors formed by SPER and FUSI gate in 45 nm physical gate length devices

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2004 since deposited on 2021-10-15
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Acq. date: 2026-01-08

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2004 since deposited on 2021-10-15
2last month
2last week
Acq. date: 2026-01-08

Citations