Authors

Severi, Simone; Kottantharayil, Anil; Pawlak, Bartek; Duffy, Ray; Henson, K.; Lindsay, R.; Lauwers, Anne; Veloso, Anabela; de Marneffe, Jean-Francois; Ramos, Javier; Sijmus, Bram; Devriendt, Katia; Camillo-Castillo, A.; Eyben, Pierre; Vandervorst, Wilfried; Jurczak, Gosia; Biesemans, Serge; De Meyer, Kristin

Conference

Technical Digest International Electron Devices Meeting - IEDM

Title

Diffusion-less junctions and super halo profiles for PMOS transistors formed by SPER and FUSI gate in 45 nm physical gate length devices

Publication type

Proceedings paper