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Integration challenges of SPER junctions for the 45 nm technology node

dc.contributor.authorSeveri, Simone
dc.contributor.authorRichard, Lindsay
dc.contributor.authorHenson, Kirklen
dc.contributor.authorPawlak, Bartek
dc.contributor.authorSatta, Alessandra
dc.contributor.authorDuffy, Ray
dc.contributor.authorSurdeanu, Radu
dc.date.accessioned2021-10-15T16:11:02Z
dc.date.available2021-10-15T16:11:02Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9584
dc.sourceIIOimport
dc.titleIntegration challenges of SPER junctions for the 45 nm technology node
dc.typeOral presentation
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorPawlak, Bartek
dc.source.peerreviewno
dc.source.conferenceVarian Worshop
dc.source.conferencedate11/07/2004
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec


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