Integration challenges of SPER junctions for the 45 nm technology node
dc.contributor.author | Severi, Simone | |
dc.contributor.author | Richard, Lindsay | |
dc.contributor.author | Henson, Kirklen | |
dc.contributor.author | Pawlak, Bartek | |
dc.contributor.author | Satta, Alessandra | |
dc.contributor.author | Duffy, Ray | |
dc.contributor.author | Surdeanu, Radu | |
dc.date.accessioned | 2021-10-15T16:11:02Z | |
dc.date.available | 2021-10-15T16:11:02Z | |
dc.date.issued | 2004 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9584 | |
dc.source | IIOimport | |
dc.title | Integration challenges of SPER junctions for the 45 nm technology node | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Severi, Simone | |
dc.contributor.imecauthor | Pawlak, Bartek | |
dc.source.peerreview | no | |
dc.source.conference | Varian Worshop | |
dc.source.conferencedate | 11/07/2004 | |
dc.source.conferencelocation | San Francisco, CA USA | |
imec.availability | Published - imec |
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