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Optimization of low-tempurature silicon nitride processes for improvement of device performance
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Optimization of low-tempurature silicon nitride processes for improvement of device performance
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Date
2004
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Sleeckx, Erik
;
Schaekers, Marc
;
Shi, Xiaoping
;
Kunnen, Eddy
;
Degroote, Bart
;
Jurczak, Gosia
;
de Potter de ten Broeck, Muriel
;
Augendre, Emmanuel
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1888
since deposited on 2021-10-15
Acq. date: 2026-01-12
Citations
Metrics
Views
1888
since deposited on 2021-10-15
Acq. date: 2026-01-12
Citations