dc.contributor.author | Sleeckx, Erik | |
dc.contributor.author | Schaekers, Marc | |
dc.contributor.author | Shi, Xiaoping | |
dc.contributor.author | Kunnen, Eddy | |
dc.contributor.author | Degroote, Bart | |
dc.contributor.author | Jurczak, Gosia | |
dc.contributor.author | de Potter de ten Broeck, Muriel | |
dc.contributor.author | Augendre, Emmanuel | |
dc.date.accessioned | 2021-10-15T16:18:30Z | |
dc.date.available | 2021-10-15T16:18:30Z | |
dc.date.issued | 2004 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9610 | |
dc.source | IIOimport | |
dc.title | Optimization of low-tempurature silicon nitride processes for improvement of device performance | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Sleeckx, Erik | |
dc.contributor.imecauthor | Schaekers, Marc | |
dc.contributor.imecauthor | Jurczak, Gosia | |
dc.contributor.imecauthor | de Potter de ten Broeck, Muriel | |
dc.contributor.orcidimec | Sleeckx, Erik::0000-0003-2560-6132 | |
dc.contributor.orcidimec | Schaekers, Marc::0000-0002-1496-7816 | |
dc.source.peerreview | no | |
dc.source.conference | 13th Workshop on Dielectrics in Microelectronics - WODIM | |
dc.source.conferencedate | 28/06/2004 | |
dc.source.conferencelocation | Kinsale Ireland | |
imec.availability | Published - imec | |